SPIE Proceedings [SPIE 1985 Microlithography Conferences -...

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SPIE Proceedings [SPIE 1985 Microlithography Conferences - Santa Clara (Monday 11 March 1985)] Optical Microlithography IV - A New Aluminosilicate Glass Substrate For Photomasks

Kokubu, Y., Shinkai, N., Haranoh, T., Stover, Harry L.
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Volume:
538
Year:
1985
Language:
english
DOI:
10.1117/12.947771
File:
PDF, 10.87 MB
english, 1985
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