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An evaporation based digital microflow meter
Nie, C, Frijns, A J H, Mandamparambil, R, Zevenbergen, M A G, den Toonder, J M JVolume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/11/115008
Date:
November, 2015
File:
PDF, 1.12 MB
english, 2015