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SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Microelectronics Technology and Process Integration - New conception in transistor technology using nonhomogenous temperature field
Kaupuzs, J., Medvids, Arthur, Chen, Fusen E., Murarka, Shyam P.Volume:
2335
Year:
1994
Language:
english
DOI:
10.1117/12.186069
File:
PDF, 1.02 MB
english, 1994