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SPIE Proceedings [SPIE International Conference on Micro-and Nano-Electronics 2012 - Zvenlgorod, Russian Federation (Monday 1 October 2012)] International Conference Micro- and Nano-Electronics 2012 - Temperature oscillations in a silicon wafer under constant power of incoherent irradiation by heating lamps in a thermal chamber of RTP set up
Rudakov, Valery I., Kurenya, Aleksey L., Ovcharov, Vladimir V., Prigara, Valeriya P., Orlikovsky, Alexander A.Volume:
8700
Year:
2013
Language:
english
DOI:
10.1117/12.2018016
File:
PDF, 852 KB
english, 2013