SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Modeling Aspects in Optical Metrology IV - Design of soft x-ray gratings for free electron lasers: from specification to characterization
Vannoni, Maurizio, La Civita, Daniele, Follath, Rolf, Samoylova, Liubov, Siewert, Frank, Sinn, Harald, Bodermann, Bernd, Frenner, Karsten, Silver, Richard M.Volume:
8789
Year:
2013
Language:
english
DOI:
10.1117/12.2020520
File:
PDF, 367 KB
english, 2013