SPIE Proceedings [SPIE SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring - Las Vegas, Nevada, United States (Sunday 20 March 2016)] Active and Passive Smart Structures and Integrated Systems 2016 - Vibration suppression in MEMS devices using electrostatic forces
Park, Gyuhae, Haddad Khodaparast, Hamed, Madinei, Hadi, Friswell, Michael I., Adhikari, SondiponVolume:
9799
Year:
2016
Language:
english
DOI:
10.1117/12.2222069
File:
PDF, 677 KB
english, 2016