SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels,...

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SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Sunday 3 April 2016)] Optical Micro- and Nanometrology VI - Vertical comb-drive microscanner with 4x4 array of micromirrors for phase-shifting Mirau microinterferometry

Gorecki, Christophe, Asundi, Anand K., Osten, Wolfgang, Bargiel, Sylwester, Lullin, Justine, Lemoal, Patrice, Perrin, Stéphane, Passilly, Nicolas, Albero, Jorge, Froehly, Luc, Lardet-Vieudrin, Franck,
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Volume:
9890
Year:
2016
Language:
english
DOI:
10.1117/12.2230487
File:
PDF, 662 KB
english, 2016
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