SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachining and Microfabrication Process Technology II - Angular alignment for wafer bonding
Chou, Yuan-Fang, Hsieh, Ming-Hsun, Pang, Stella W., Chang, Shih-ChiaVolume:
2879
Year:
1996
Language:
english
DOI:
10.1117/12.251229
File:
PDF, 188 KB
english, 1996