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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Microelectronic Structures and MEMS for Optical Processing II - Fabrication of optomechanical structures suitable for microwave phase conjugation
Tsap, Boris, Pister, Kristofer S. J., Fetterman, Harold R., Motamedi, M. Edward, Bailey, WayneVolume:
2881
Year:
1996
Language:
english
DOI:
10.1117/12.251260
File:
PDF, 249 KB
english, 1996