SPIE Proceedings [SPIE Microlithography '97 - Santa Clara, CA (Monday 10 March 1997)] Metrology, Inspection, and Process Control for Microlithography XI - Optical characterization of attenuated phase shifters
Callegari, Alessandro, Babich, Katherina, Jones, Susan K.Volume:
3050
Year:
1997
Language:
english
DOI:
10.1117/12.275940
File:
PDF, 683 KB
english, 1997