SPIE Proceedings [SPIE ISMA '97 International Symposium on Microelectronics and Assembly - Singapore, Singapore (Monday 23 June 1997)] Microlithographic Techniques in IC Fabrication - Deep ion-beam lithography for micromachining applications
Springham, Stuart V., Osipowicz, Thomas, Sanchez, J. L., Lee, Sing, Watt, Frank, Yoon, Soon Fatt, Yu, Raymond, Mack, Chris A.Volume:
3183
Year:
1997
Language:
english
DOI:
10.1117/12.280533
File:
PDF, 1.64 MB
english, 1997