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SPIE Proceedings [SPIE ISMA '97 International Symposium on Microelectronics and Assembly - Singapore, Singapore (Monday 23 June 1997)] Microelectronic Packaging and Laser Processing - Scribing of ITO coatings using a Q-switched Nd:YAG laser
Tam, Siu Chung, Chen, Yihong, Zheng, HongYu, Chen, W. L., Swee, Yong Khim, Zheng, HongYu, Chen, Ray T.Volume:
3184
Year:
1997
Language:
english
DOI:
10.1117/12.280572
File:
PDF, 861 KB
english, 1997