SPIE Proceedings [SPIE Optoelectronics and High-Power Lasers & Applications - San Jose, CA (Saturday 24 January 1998)] Spatial Light Modulators - Fabrication of spatial light modulator backplanes using damascene processing
O'Hara, Anthony, Bodammer, Georg K., Vass, David G., McGhee, Larry, Stevenson, J. Tom M., Underwood, Ian, Sutherland, Richard L.Volume:
3292
Year:
1998
Language:
english
DOI:
10.1117/12.305496
File:
PDF, 692 KB
english, 1998