![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachined Devices and Components IV - Fabrication of micro torsional actuator using surface plus bulk micromachining processes
Hsieh, Jerwei, Fang, Weileun, French, Patrick J., Chau, Kevin H.Volume:
3514
Year:
1998
Language:
english
DOI:
10.1117/12.323910
File:
PDF, 1.06 MB
english, 1998