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SPIE Proceedings [SPIE SPIE's International Symposium on Optical Science, Engineering, and Instrumentation - San Diego, CA (Sunday 19 July 1998)] Optical Diagnostic Methods for Inorganic Transmissive Materials - FTIR reflectance characterization of SIMOX buried oxide layers
Yakovlev, Victor A., Bosch-Charpenay, Sylvie, Rosenthal, Peter A., Solomon, Peter R., Xu, Jiazhan, Datla, Raju V., Hanssen, Leonard M.Volume:
3425
Year:
1998
Language:
english
DOI:
10.1117/12.326654
File:
PDF, 896 KB
english, 1998