SPIE Proceedings [SPIE Optoelectronics '99 - Integrated Optoelectronic Devices - San Jose, CA (Saturday 23 January 1999)] Silicon-based Optoelectronics - Leakage current reduction of metal-semiconductor-metal photodetectors by using a thin interfacial silicon dioxide layer
Seto, Myron, Rochefort, C., de Jager, S., Houghton, Derek C., Fitzgerald, Eugene A.Volume:
3630
Year:
1999
Language:
english
DOI:
10.1117/12.342794
File:
PDF, 2.64 MB
english, 1999