![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Optical Engineering for Sensing and Nanotechnology (ICOSN '99) - Yokohama, Japan (Wednesday 16 June 1999)] Optical Engineering for Sensing and Nanotechnology (ICOSN '99) - Fine OPC approach with gray-tone coding mask
Du, Jinglei, Su, Jingqin, Huang, Qizhong, Zhang, Yixiao, Guo, Yongkang, Du, Chunlei, Cui, Zheng, Yamaguchi, IchirouVolume:
3740
Year:
1999
Language:
english
DOI:
10.1117/12.347834
File:
PDF, 235 KB
english, 1999