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SPIE Proceedings [SPIE Optical Engineering for Sensing and Nanotechnology (ICOSN '99) - Yokohama, Japan (Wednesday 16 June 1999)] Optical Engineering for Sensing and Nanotechnology (ICOSN '99) - Fine OPC approach with gray-tone coding mask

Du, Jinglei, Su, Jingqin, Huang, Qizhong, Zhang, Yixiao, Guo, Yongkang, Du, Chunlei, Cui, Zheng, Yamaguchi, Ichirou
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Volume:
3740
Year:
1999
Language:
english
DOI:
10.1117/12.347834
File:
PDF, 235 KB
english, 1999
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