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SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachining and Microfabrication Process Technology V - LIGA: metals, plastics, and ceramics
Hruby, Jill M., Griffiths, Stewart K., Domeier, Linda A., Morales, Alfredo M., Boehme, Dale R., Bankert, Michelle A., Bonivert, William D., Hachman, John T., Skala, Dawn M., Ting, Aili, Smith, James HVolume:
3874
Year:
1999
Language:
english
DOI:
10.1117/12.361216
File:
PDF, 2.56 MB
english, 1999