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SPIE Proceedings [SPIE Photonics East '99 - Boston, MA (Sunday 19 September 1999)] Three-Dimensional Imaging, Optical Metrology, and Inspection V - Small displacement measurements based on total-internal-reflection heterodyne interferometry
Chiu, Ming-Horng, Lin, Jiun-You, Su, Der-Chin, Harding, Kevin G.Volume:
3835
Year:
1999
Language:
english
DOI:
10.1117/12.370266
File:
PDF, 250 KB
english, 1999