SPIE Proceedings [SPIE 16th European Conference on Mask...

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SPIE Proceedings [SPIE 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Munich, Germany (Monday 15 November 1999)] 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Cluster tool for photomask inspection and qualification at 150-nm design rules and beyond

Peter, Kai, Ordynskyy, Volodymyr, Dolainsky, Christoph, Hartmann, Hans, Brueck, Hans-Juergen, Behringer, Uwe F. W.
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Volume:
3996
Year:
2000
Language:
english
DOI:
10.1117/12.377100
File:
PDF, 122 KB
english, 2000
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