SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries - In-situ ellipsometric measurements of thin film aluminum oxidation
Lindmark, Eric K., Nowak, Janusz J., Kief, Mark T., Al-Jumaily, Ghanim A., Duparre, Angela, Singh, BhanwarVolume:
4099
Year:
2000
Language:
english
DOI:
10.1117/12.405822
File:
PDF, 481 KB
english, 2000