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SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Soft X-Ray and EUV Imaging Systems - Mo/Si multilayer coating technology for EUVL: coating uniformity and time stability
Louis, Eric, Yakshin, Andrey E., Goerts, Peter C., Oestreich, Sebastian, Maas, Edward L. G., Kessels, M. J. H., Schmitz, Detlef, Scholze, Frank, Ulm, Gerhard, Muellender, Stefan, Haidl, Markus, BijkerVolume:
4146
Year:
2000
Language:
english
DOI:
10.1117/12.406676
File:
PDF, 202 KB
english, 2000