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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Micromachining and Microfabrication Process Technology VII - Toward the micromachined vibrating gyroscope using (111) silicon wafer process
Hsieh, Jerwei, Chen, Wen-Chih, Fang, Weileun, Karam, Jean Michel, Yasaitis, John A.Volume:
4557
Year:
2001
Language:
english
DOI:
10.1117/12.442961
File:
PDF, 867 KB
english, 2001