SPIE Proceedings [SPIE Second International Symposium on Laser Precision Micromachining - Singapore, Singapore (Wednesday 16 May 2001)] Second International Symposium on Laser Precision Microfabrication - Processes in semiconductor materials after laser cutting
Novoselov, Andrei R., Klimenko, Anatoly G., Miyamoto, Isamu, Lu, Yong Feng, Sugioka, Koji, Dubowski, Jan J.Volume:
4426
Year:
2002
Language:
english
DOI:
10.1117/12.456883
File:
PDF, 165 KB
english, 2002