SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] MOEMS and Miniaturized Systems III - Electrostatically actuated membrane mirrors for adaptive optics
Kurczynski, Peter, Bogart, Gregory R., Lai, Warren Y., Lifton, Victor, Mansfield, William M., Tyson, J. Anthony, Sadoulet, Bernard, Williams, David R., Smith, James H.Volume:
4983
Year:
2003
Language:
english
DOI:
10.1117/12.473642
File:
PDF, 133 KB
english, 2003