![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Micromachining and Microfabrication Process Technology VIII - Performance enhancement and evaluation of deep dry etching on a production cluster platform
McNie, Mark E., Pickering, Christopher, Rickard, Alexandra L., Young, Iain M., Hopkins, Janet, Ashraf, Huma, McAuley, Serrita A., Nicholls, Glenn, Barnett, Richard, Roozeboom, Fred, Kemmeren, Anton, VVolume:
4979
Year:
2003
Language:
english
DOI:
10.1117/12.478242
File:
PDF, 730 KB
english, 2003