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SPIE Proceedings [SPIE Fundamental Problems of Optoelectronics and Microelectronics - Vladivostok, Russian Federation (Monday 30 September 2002)] Fundamental Problems of Optoelectronics and Microelectronics - Electrical conductivity of surface phases on silicon
Tsukanov, Dmitry A., Ryzhkov, Sergey V., Belous, Igor A., Utas, Oleg A., Lifshits, Victor G., Kulchin, Yuri N., Vitrik, Oleg B.Volume:
5129
Year:
2003
Language:
english
DOI:
10.1117/12.502396
File:
PDF, 309 KB
english, 2003