SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Lithographic and Micromachining Techniques for Optical Component Fabrication II - Periodic structures with arbitrary shapes recorded by multiple-beam interference
Weiteneder, Christophe, Klaus, Werner, Herzig, Hans Peter, Kley, Ernst-Bernhard, Herzig, Hans PeterVolume:
5183
Year:
2003
Language:
english
DOI:
10.1117/12.508619
File:
PDF, 375 KB
english, 2003