SPIE Proceedings [SPIE Optoelectronic and Electronic Sensors V - Rzeszow, Poland (Wednesday 5 June 2002)] Optoelectronic and Electronic Sensors V - Remotely microwave-enhanced wet anisotropic etching of monocrystalline silicon utilizing a memory effect of microwave activation of KOH
Walczak, Rafal, Dziuban, Jan, Kalita, WlodzimierzVolume:
5124
Year:
2003
Language:
english
DOI:
10.1117/12.517062
File:
PDF, 351 KB
english, 2003