SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Emerging Lithographic Technologies IX - Target fabrication of low-density and nanoporous tin oxide as laser targets to generate extreme ultraviolet
Nagai, Keiji, Mackay, R. Scott, Gu, Q-c., Norimatsu, T., Nishimura, H., Fujioka, S., Tao, Y-z., Okuno, T., Nishihara, K., Miyanaga, N., Izawa, Y.Volume:
5751
Year:
2005
Language:
english
DOI:
10.1117/12.600404
File:
PDF, 396 KB
english, 2005