SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] Micromachining Technology for Micro-Optics and Nano-Optics IV - Optical module fabrication using nanoimprint technology
Rossi, Markus, Rudmann, Hartmut, Westenhöfer, Susanne, Salt, Martin, Pelzer, Rainer, Johnson, Eric G., Nordin, Gregory P., Suleski, Thomas J.Volume:
6110
Year:
2006
Language:
english
DOI:
10.1117/12.646520
File:
PDF, 420 KB
english, 2006