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SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Emerging Lithographic Technologies X - Energy spectra and charge states of debris emitted from laser-produced minimum mass tin plasmas
Fujioka, Shinsuke, Lercel, Michael J., Nishimura, Hiroaki, Ando, Tsuyoshi, Ueda, Nobuyoshi, Namba, Shinichi, Aota, Tatsuya, Murakami, Masakatsu, Nishihara, Katsunobu, Kang, Young-G., Sunahara, AtsushiVolume:
6151
Year:
2006
Language:
english
DOI:
10.1117/12.656071
File:
PDF, 576 KB
english, 2006