SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and Nanofabrication - San Jose, California, United States (Saturday 20 January 2007)] MEMS/MOEMS Components and Their Applications IV - Integrated nanomechanical motion detection by means of optical evanescent wave coupling
De Vlaminck, I., Tadigadapa, Srinivas A., Ghodssi, Reza, Roels, J., Taillaert, D., Henning, Albert K., Van Thourhout, D., Lagae, L., Baets, R., Borghs, G.Volume:
6464
Year:
2007
Language:
english
DOI:
10.1117/12.700374
File:
PDF, 1002 KB
english, 2007