SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and Nanofabrication - San Jose, California, United States (Saturday 20 January 2007)] Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII - Diffractive optical elements fabricated by precise pressing of glass
Maher, Mary-Ann, Vogt, Helge, Wölfing, Bernd, Stewart, Harold D., Chiao, Jung-Chih, Pawlowski, Edgar, Suleski, Thomas J., Johnson, Eric G., Nordin, Gregory P.Volume:
6462
Year:
2007
Language:
english
DOI:
10.1117/12.717952
File:
PDF, 224 KB
english, 2007