![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE European Mask and Lithography Conf 2007 - Grenoble, France (Monday 22 January 2007)] 23rd European Mask and Lithography Conference - Focused electron beam induced deposition of pure SIO 2
Perentes, Alexandre, Hoffmann, Patrik, Munnik, FransVolume:
6533
Year:
2007
Language:
english
DOI:
10.1117/12.736918
File:
PDF, 332 KB
english, 2007