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SPIE Proceedings [SPIE MOEMS-MEMS 2008 Micro and Nanofabrication - San Jose, CA (Saturday 19 January 2008)] Micromachining and Microfabrication Process Technology XIII - Parallel-kinematic-mechanism-based monolithic XY micropositioning stage with rotary comb drive actuators
Mukhopadhyay, Deepkishore, Maher, Mary-Ann, Chiao, Jung-Chih, Dong, Jingyan, Ferreira, Placidus M., Resnick, Paul J.Volume:
6882
Year:
2008
Language:
english
DOI:
10.1117/12.762358
File:
PDF, 1.29 MB
english, 2008