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SPIE Proceedings [SPIE MOEMS-MEMS 2008 Micro and Nanofabrication - San Jose, CA (Saturday 19 January 2008)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics - Step and flash imprint process integration techniques for photonic crystal patterning: template replication through wafer patterning irrespective of tone
Miller, Mike, Suleski, Thomas J., Schoenfeld, Winston V., Brooks, Cindy, Lentz, David, Wang, Jian J., Doyle, Gary, Resnick, Doug, LaBrake, DwayneVolume:
6883
Year:
2008
Language:
english
DOI:
10.1117/12.771302
File:
PDF, 1.13 MB
english, 2008