SPIE Proceedings [SPIE SPIE Lithography Asia - Taiwan -...

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SPIE Proceedings [SPIE SPIE Lithography Asia - Taiwan - Taipei, Taiwan (Tuesday 4 November 2008)] Lithography Asia 2008 - Model-based sub-resolution assist features using an inverse lithography method

Yu, Jue-Chin, Chen, Alek C., Lin, Burn, Yu, Peichen, Chao, Hsueh-Yung, Yen, Anthony
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Volume:
7140
Year:
2008
Language:
english
DOI:
10.1117/12.804678
File:
PDF, 291 KB
english, 2008
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