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SPIE Proceedings [SPIE 25th European Mask and Lithography Conference - Dresden, Germany (Monday 12 January 2009)] 25th European Mask and Lithography Conference - Molecular dynamics study on mold fracture by nanoscale defects in nanoimprint lithography
Tada, K., Behringer, Uwe F. W., Yasuda, M., Fujii, N., Kawata, H., Hirai, Y.Volume:
7470
Year:
2009
Language:
english
DOI:
10.1117/12.835201
File:
PDF, 933 KB
english, 2009