![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE International Conference on Optical Instrumentation and Technology - Shanghai, China (Monday 19 October 2009)] 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications - Tunable RF MEMS capacitor for wireless communication
Zhou, Zhaoying, Li, Xiuhan, Xia, Yu, Fukuda, Toshio, Seidel, Helmut, Liu, Jian, Yin, Li, Li, Xinxin, Zhang, Haixia, Liu, Yu, Fang, Dongming, Cui, Tianhong, Zhang, HaixiaVolume:
7510
Year:
2009
Language:
english
DOI:
10.1117/12.845903
File:
PDF, 1.50 MB
english, 2009