SPIE Proceedings [SPIE 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies - Dalian, China (Monday 26 April 2010)] 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Design of multilayer grating in VUV spectrum by rigorous coupled-wave method
He, Shengnan, Yang, Li, Namba, Yoshiharu, Liu, Ying, Chen, Huoyao, Walker, David D., Li, Shengyi, Qiu, Keqiang, Fu, ShaojunVolume:
7655
Year:
2010
Language:
english
DOI:
10.1117/12.866135
File:
PDF, 323 KB
english, 2010