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SPIE Proceedings [SPIE 1981 Microlithography Conferences - San Jose (Monday 30 March 1981)] Optical Characterization Techniques for Semiconductor Technology - Infrared Reflectance Spectra Of Thin-Epitaxial Silicon Layers
Senitzky, Benjamin, Weeks, S. P., Aspnes, David E., Potter, Roy F., So, Samuel S.Volume:
276
Year:
1981
Language:
english
DOI:
10.1117/12.931710
File:
PDF, 224 KB
english, 1981