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SPIE Proceedings [SPIE Semiconductor Conferences - Bay Point, FL (Monday 23 March 1987)] Modern Optical Characterization Techniques for Semiconductors and Semiconductor Devices - Growth Of Atomic Layer Structures By Modified MOCVD And Their Characterization
Horikoshi, Y., Kobayashi, N., Toriyama, T., Glembocki, Orest J., Pollak, Fred H., Song, Jin-JooVolume:
794
Year:
1987
Language:
english
DOI:
10.1117/12.940907
File:
PDF, 363 KB
english, 1987