SPIE Proceedings [SPIE Semiconductor Conferences - Bay Point, FL (Monday 23 March 1987)] Modern Optical Characterization Techniques for Semiconductors and Semiconductor Devices - Infrared Reflectance Spectroscopy Of Ion-Implanted Soi Structures
Lacquet, Bea M., Swart, Pieter L., Glembocki, Orest J., Pollak, Fred H., Song, Jin-JooVolume:
794
Year:
1987
Language:
english
DOI:
10.1117/12.940915
File:
PDF, 323 KB
english, 1987