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Resolution Enhancement Techniques and Design for Manufacturability: Containing and Accounting for Variabilities in Integrated Circuit Creation
Wong, Alfred K. K.Volume:
6
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.2784723
Date:
July, 2007
File:
PDF, 36 KB
english, 2007