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SPIE Proceedings [SPIE SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation - San Diego, CA (Sunday 11 July 1993)] Electron-Beam Sources of High-Brightness Radiation - Synchrotrons for x-ray lithography
Younger, Francis C., Trippe, Anthony P., Freund, Henry P.Volume:
2013
Year:
1993
Language:
english
DOI:
10.1117/12.164796
File:
PDF, 560 KB
english, 1993