![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Manufacturing Process Control for Microelectronic Devices and Circuits - Comparison of controller tuning methods for temperature uniformity control in a rapid thermal processor
Balakrishnan, K. S., Cho, Wonhui, Edgar, Thomas F., Sabnis, Anant G.Volume:
2336
Year:
1994
Language:
english
DOI:
10.1117/12.186774
File:
PDF, 560 KB
english, 1994