SPIE Proceedings [SPIE International Conference on Micro-and Nano-Electronics 2012 - Zvenlgorod, Russian Federation (Monday 1 October 2012)] International Conference Micro- and Nano-Electronics 2012 - Detection of processes inducing profile changes of relief structures in SEM by analysis of their distorted images
Larionov, Yu. V., Novikov, Yu. A., Orlikovsky, Alexander A.Volume:
8700
Year:
2013
Language:
english
DOI:
10.1117/12.2016999
File:
PDF, 497 KB
english, 2013