SPIE Proceedings [SPIE Photonics West '95 - San Jose, CA (Wednesday 1 February 1995)] Laser-Induced Thin Film Processing - Fabrication of submicron relief gratings in p-GaAs in the process of maskless holographic wet etching by laser-induced etch rate reduction method
Khudobenko, Alexander I., Panchenko, Vladislav Y., Seminogov, Vladimir N., Dubowski, Jan J.Volume:
2403
Year:
1995
Language:
english
DOI:
10.1117/12.206266
File:
PDF, 326 KB
english, 1995