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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Micromachined Devices and Components - Mechanical and optical characterization of thermal microactuators fabricated in a CMOS process
Read III, Britton C., Bright, Victor M., Comtois, John H., Roop, Ray M., Chau, Kevin H.Volume:
2642
Year:
1995
Language:
english
DOI:
10.1117/12.221166
File:
PDF, 640 KB
english, 1995